In a recent announcement, the State Administration for Market Regulation has officially approved three new national primary standard substances: two-dimensional chromium nano gratings, two-dimensional silicon nano gratings, and one-dimensional silicon nano gratings. These standards are set to meet the requirements of the nano-manufacturing industry and length calibration, offering precise benchmarks for critical sectors such as next-generation information technology, new materials, biomanufacturing, and high-end equipment.
The development of high-precision nano-level standard substances is essential for establishing a reliable chain of nano measurement transfer. This advancement directly contributes to enhancing the trustworthiness of domestically produced nano-manufacturing products. The two-dimensional chromium nano grating standard substance employs an innovative step-by-step deposition atomic lithography technique, which poses notable challenges in its production. This method enables direct traceability to naturally occurring quantum physical constants, achieving an impressive angular accuracy of approximately 0.001°—akin to slicing a cake into 360,000 equal pieces.
Typically, the structural area of a two-dimensional chromium nano grating is 300μm x 300μm. When handled with care to avoid scratches or damage, each use covers an area of 2μm x 2μm, allowing for more than 20,000 uses without needing to repeat measurement zones.
These standard substances will be instrumental in calibrating micro-nano detection devices such as atomic force microscopes and scanning electron microscopes at the wafer level. Furthermore, they can be employed for grating interferometry calibration of various parameters within ultra-precise displacement sensors.
The successful development of these nano-level angular standard substances represents a considerable step forward in refining measurements in the nano measurement field. This innovation mitigates the risk of error amplification typically associated with traditional hierarchical value transfer methods. It enables the online calibration of high-precision measurement data to be directly transmitted to enterprise measurement sites, providing strong support for the high-quality development of China’s nano-manufacturing industry.
